• Plate
• Boat
• Tube
• Tank
• Others

8 Bell Jar	12 Bell Jar	Baffle	Cover Plate	Door & Baffle Set
Door Plate	Edge Ring	Endpoint Window	Fin Insulator	Insulator
Tray	Tray	Plate	BLADE QUARTZ	View Port 圓型
Quartz Ring	12"ICP Quartz Ring	6"Cover Plate	Y型手臂	Window
DSQ Quartz Window	Quartz Window	Rotation Tray	石英鏡面板